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Title:

Layer Stack Dependencies of Self-Generated Nonlinear Signals in Layered SAW Resonators

Document type:
Konferenzbeitrag
Author(s):
Forster, Thomas; Mayer, Markus; Chauhan, Vikrant; Schmidt, Peter; Ebner, Thomas; Wagner, Karl; Hagelauer, Amelie
Abstract:
In this work a systematic investigation was carried out, which targeted the dependencies of nonlinear generated signals on the layer stack of a device. Previous work on material contributions to nonlinearity focused almost exclusively on TC-SAW devices. To clarify how nonlinearity depends on the stack of layered systems, test devices with a nearly constant admittance curve for respectively different layer stacks were designed. Using the Design of Experiment methodology, a response surface depend...     »
Keywords:
Performance evaluation; Systematics; Design methodology; Surface acoustic waves; Harmonic analysis; Acoustics; Response surface methodology
Book / Congress title:
2022 IEEE International Ultrasonics Symposium (IUS)
Year:
2022
Month:
Oct
Pages:
1-4
Fulltext / DOI:
doi:10.1109/IUS54386.2022.9957339
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