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Titel:

Layer Stack Dependencies of Self-Generated Nonlinear Signals in Layered SAW Resonators

Dokumenttyp:
Konferenzbeitrag
Autor(en):
Forster, Thomas; Mayer, Markus; Chauhan, Vikrant; Schmidt, Peter; Ebner, Thomas; Wagner, Karl; Hagelauer, Amelie
Abstract:
In this work a systematic investigation was carried out, which targeted the dependencies of nonlinear generated signals on the layer stack of a device. Previous work on material contributions to nonlinearity focused almost exclusively on TC-SAW devices. To clarify how nonlinearity depends on the stack of layered systems, test devices with a nearly constant admittance curve for respectively different layer stacks were designed. Using the Design of Experiment methodology, a response surface depend...     »
Stichworte:
Performance evaluation; Systematics; Design methodology; Surface acoustic waves; Harmonic analysis; Acoustics; Response surface methodology
Kongress- / Buchtitel:
2022 IEEE International Ultrasonics Symposium (IUS)
Jahr:
2022
Monat:
Oct
Seiten:
1-4
Volltext / DOI:
doi:10.1109/IUS54386.2022.9957339
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