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- Title:
Automated, deep reactive ion etching free fiber coupling to nanophotonic devices
- Document type:
- Konferenzbeitrag
- Author(s):
- Flassig, Fabian; Flaschmann, Rasmus; Kainz, Thomas; Ernst, Sven; Strohauer, Stefan; Schmid, Christian; Zugliani, Lucio; Müller, Kai; Finley, Jonathan J.
- Editor:
- Razeghi, Manijeh
- Book / Congress title:
- Quantum Sensing and Nano Electronics and Photonics XVIII
- Publisher:
- SPIE
- Date of publication:
- 05.03.2022
- Year:
- 2022
- Fulltext / DOI:
- doi:10.1117/12.2611160
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