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Title:

Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

Document type:
Konferenzbeitrag
Author(s):
Flassig, Fabian; Flaschmann, Rasmus; Kainz, Thomas; Ernst, Sven; Strohauer, Stefan; Schmid, Christian; Zugliani, Lucio; Müller, Kai; Finley, Jonathan J.
Editor:
Razeghi, Manijeh
Book / Congress title:
Quantum Sensing and Nano Electronics and Photonics XVIII
Publisher:
SPIE
Date of publication:
05.03.2022
Year:
2022
Fulltext / DOI:
doi:10.1117/12.2611160
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