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Title:

Thermoelastic Damping in MEMS Gyroscopes at High Frequencies

Document type:
Zeitschriftenaufsatz
Author(s):
Schiwietz, D.; Weig, E.M.; Degenfeld-Schonburg, P.
Abstract:
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high frequency mechanical modes of the structure. In this paper, we inves...     »
Journal title:
arXiv:2208.02591 [cond-mat.mes-hall] 2022-08
Year:
2022
Year / month:
2022-08
Quarter:
3. Quartal
Month:
Aug
Language:
en
Fulltext / DOI:
doi:10.48550/arXiv.2208.02591
WWW:
https://arxiv.org/abs/2208.02591
Publisher:
Cornell University
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