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- Title:
Fluidic Damping in Micro- and Nano-Scale Mechanical Resonators in the Molecular Flow Regime: A Momentum Transfer Based Analytical Approach
- Document type:
- Konferenzbeitrag
- Author(s):
- Manz, J.; Wachutka, G.; Schrag, G.
- Book / Congress title:
- Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems
- Date of congress:
- June 21-25
- Year:
- 2015
- Pages:
- 2168-2171
BibTeX
Occurrences:
- mediaTUM GesamtbestandEinrichtungenSchools TUM School of Computation, Information and TechnologyDepartmentsElectrical EngineeringMicrosensors and Actuators (Prof. Schrag)