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Title:

Influence of surface structure on shape and roughness measurement using two-wavelength speckle interferometry

Document type:
Konferenzbeitrag
Author(s):
Bodendorfer, T.; Mayinger, P.; Koch, A.W.
Book / Congress title:
SPIE Optical Metrology 2013, Modeling Aspects in Optical Metrology IV
Congress (additional information):
Munich, Germany, 13.05.2013, conference vol. 8789, paper no. 8789-8, doi:10.1117/12.2020270, http://dx.doi.org/10.1117/12.2020270
Volume:
vol. 8789
Date of congress:
13.05.2013
Year:
2013
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:http://dx.doi.org/10.1117/12.2020270
Semester:
SS 13
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