50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

Gründl, T.; Zogal, K.; Debernardi, P.; Gierl, C.; Grasse, C.; Geiger, K.; Meyer, R.; Bühm, G.; Amann, M. C.; Meissner, P.; Kuepper, F.

Title:: 50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength
Author(s):: Gründl, T.; Zogal, K.; Debernardi, P.; Gierl, C.; Grasse, C.; Geiger, K.; Meyer, R.; Bühm, G.; Amann, M. C.; Meissner, P.; Kuepper, F.
Journal title:: Semiconductor Science and Technology
Year:: 2012
Journal volume:: 28
Journal issue:: 12001
Pages contribution:: 1--4
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