50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

Gründl, T.; Zogal, K.; Debernardi, P.; Gierl, C.; Grasse, C.; Geiger, K.; Meyer, R.; Bühm, G.; Amann, M. C.; Meissner, P.; Kuepper, F.

Titel:: 50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength
Autor(en):: Gründl, T.; Zogal, K.; Debernardi, P.; Gierl, C.; Grasse, C.; Geiger, K.; Meyer, R.; Bühm, G.; Amann, M. C.; Meissner, P.; Kuepper, F.
Zeitschriftentitel:: Semiconductor Science and Technology
Jahr:: 2012
Band / Volume:: 28
Heft / Issue:: 12001
Seitenangaben Beitrag:: 1--4
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