- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Koop, H., Schnurbusch, D., Müller, M., Gründl, T., Zech, M., Amann, M. C., Karrai, K., Holleitner, A.
- Title:
- In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy
- Journal title:
- Journal of Vacuum Science and Technology
- Year:
- 2010
- Year / month:
- 2010-07
- Quarter:
- 3. Quartal
- Month:
- Jul
- Journal issue:
- 28/4
- Reviewed:
- ja
- Language:
- en
- Fulltext / DOI:
- doi:10.1116/1.3457938
- WWW:
- http://avspublications.org/jvstb/resource/1/jvtbd9/v28/i4/p802_s1
- Print-ISSN:
- 1071-1023
- Status:
- published (reviewed)
- Semester:
- SS 02
- TUM Institution:
- Lehrstuhl für Halbleitertechnologie (E26)
- Format:
- Text
BibTeX