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Title:

Impact of sensor design on the contactless inspection of planar electronic devices by capacitive coupling

Document type:
Zeitschriftenaufsatz
Author(s):
Koerdel, M.; Alatas, F.; Schick, A.; Rupitsch, S.J.; Lerch, R.
Journal title:
Procedia Engineering
Year:
2011
Journal volume:
vol. 25
Pages contribution:
pp. 415-418
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:dx.doi.org/10.1016/j.proeng.2011.12.103
Status:
Verlagsversion / published
Semester:
WS 11-12
Format:
Text
 BibTeX