Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates

Titel:: Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates
Dokumenttyp:: Zeitschriftenaufsatz
Autor(en):: Pinzek, Simon; Gustschin, Alex; Gustschin, Nikolai; Viermetz, Manuel; Pfeiffer, Franz
Zeitschriftentitel:: Scientific Reports
Jahr:: 2022
Band / Volume:: 12
Heft / Issue:: 1
Volltext / DOI:: doi:10.1038/s41598-022-08222-z
Verlag / Institution:: Springer Science and Business Media LLC
E-ISSN:: 2045-2322
Publikationsdatum:: 30.03.2022
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