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Titel:

Nanomagnet Fabrication Using Nanoimprint Lithography and Electrodeposition

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Imtaar, M.A.; Yadav, A.; Epping, A.; Becherer, M.; Fabel, B.; Rezgani, J.; Csaba, G.; Bernstein, G.H.; Scarpa, G.; Porod, W.; Lugli, P.
Abstract:
We present a novel fabrication process for the growth of metal nanostructures that combines nanoimprint lithography and electrodeposition, both of which are suitable for large-scale industrial fabrication. Gold nanostructures fabricated by nanoimprint lithography on a highly doped, p-type, Si wafer act as a seed layer for metal electrodeposition. This novel process has wide applications in nanomagnet logic and surface-enhanced electrochemistry. We fabricate magnetic nanowires and nanodots usin...     »
Zeitschriftentitel:
Nanotechnology, IEEE Transactions on (Volume:12 , Issue: 4 ) 2013-07
Jahr:
2013
Jahr / Monat:
2013-07
Quartal:
3. Quartal
Monat:
Jul
Seitenangaben Beitrag:
547 - 552
Volltext / DOI:
doi:10.1109/TNANO.2013.2257833
WWW:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6497530
Verlag / Institution:
IEEE Xplore Digital Library
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