Login
- Title:
Focused ion beam lithography for rapid prototyping of metallic films
- Document type:
- Konferenzbeitrag
- Author(s):
- Osswald, P.; Kiermaier, J.; Becherer, M.; Schmitt-Landsiedel, D.
- Book / Congress title:
- Verhandl. DPG (VI) 45, 3
- Volume:
- 45
- Year:
- 2010
BibTeX