The RE123 (RE = rare earth) Superconductors with the model substance YBa2Cu3O7 are very interesting for technical application because of their outstanding properties in magnetic fields. Their fabrication in the form of thin films by means of thermal coevaporation requires a tricky form of oxygen supply during film growth. In this work two of the possible Methods were studied and evaluated. The pulsed nozzle method and the use of a double nozzle in continuous mode. In addition to the discussion of the different methods of fabrication, the effect of chemical modifications in the RE123 system was scrutinised. Additionally, the effect of different regimes of oxidation were analysed with respect to film growth on a microscopic scale.
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