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Original title:
Widely Tunable Vertical-Cavity Surface-Emitting Lasers
Translated title:
Weit Abstimmbare Vertikalresonator Laserdioden
Author:
Gründl, Tobias
Year:
2017
Document type:
Dissertation
Faculty/School:
Fakultät für Physik
Advisor:
Amann, Markus-Christian (Prof. Dr.)
Referee:
Amann, Markus-Christian (Prof. Dr.); Finley, Jonathan J. (Prof., Ph.D.); Bimberg, Dieter (Prof., Ph.D.)
Language:
en
Subject group:
PHY Physik
Keywords:
VCSEL, Short-Cavity, Micro-Electro-Mechanical-System, MEMS, Surface-Micro-Machining, SMM, Sub-Wavelength-Grating, SWG, High-Contrast-Grating, HCG, Tunable, Highpower, Highspeed, Wide Tunability, Singlemode, Continuous Tuning, Monolithic, Monolithically-Integrated-MEMS, MIMS, Membrane, Membrane Theory, InP, InP VCSEL, Hakki-Paoli, Cassidy
Translated keywords:
VCSEL, Short-Cavity, Micro-Electro-Mechanical-System, MEMS, Surface-Micro-Machining, SMM, Sub-Wavelength-Grating, SWG, High-Contrast-Grating, HCG, Tunable, Highpower, Highspeed, Wide Tunability, Singlemode, Continuous Tuning, Monolithic, Monolithically-Integrated-MEMS, MIMS, Membrane, Membrane Theory, InP, InP VCSEL, Hakki-Paoli, Cassidy
TUM classification:
ELT 300d
Abstract:
In this work, the design and the manufacturing of vertical-cavity surface-emitting lasers for various emission wavelengths is discussed. The main focus is at InP-based material systems addressing the 1.3 to 2.3 µm emission range. The new key-technologies including the short-cavity concept and the surface-micro-machining technology offer device performances of the electrically pumped VCSEL structures with world record values in highpower, highspeed and continuous wavelength tuning.
Translated abstract:
Das Thema dieser Arbeit ist das Design und die Herstellung von weit abstimmbaren Vertikalresonator Laserdioden für verschiedene Emissionswellenlängen. Der Fokus liegt schwerpunktmäßig auf dem InP-basierten Materialsystem welches einen Spektralbereich zwischen 1.3 und 2.3 µm bedient. Die neuartigen Schlüsseltechnologien wie das Short-Cavity Konzept und die Surface-Micro-Machining Technologie ermöglichen Weltrekordwerte in Ausgangsleistung, Modulation und kontinuierlicher Wellenlängenabstimmung.
Series:
Ausgewählte Probleme der Halbleiterphysik und Technologie
Series volume:
207
ISBN:
978-3-946379-07-2
WWW:
https://mediatum.ub.tum.de/?id=1292900
Date of submission:
15.02.2017
Oral examination:
20.04.2017
Last change:
21.07.2017
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