- Title:
Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Hochreiter, A.; Bredol, P.; David, F.; Demiralp, B.; Weber, H. B.; Weig, E. M.
- Year:
- 2025
- Fulltext / DOI:
- doi:10.48550/ARXIV.2501.17960
- Publisher:
- arXiv
- Date of publication:
- 01.01.2025
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