Monolithic 3D Integrated BEOL Dual-Port Ferroelectric FET to Break the Tradeoff Between the Memory Window and the Ferroelectric Thickness

Title:: Monolithic 3D Integrated BEOL Dual-Port Ferroelectric FET to Break the Tradeoff Between the Memory Window and the Ferroelectric Thickness
Document type:: Konferenzbeitrag
Author(s):: Prakash, Om; Ni, Kai; Amrouch, Hussam
Book / Congress title:: 2023 IEEE International Reliability Physics Symposium (IRPS)
Year:: 2023
Month:: 03
Pages:: 1-4
Fulltext / DOI:: doi:10.1109/IRPS48203.2023.10118286
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