Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates

Title:: Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates
Document type:: Zeitschriftenaufsatz
Author(s):: Pinzek, Simon; Gustschin, Alex; Gustschin, Nikolai; Viermetz, Manuel; Pfeiffer, Franz
Journal title:: Scientific Reports
Year:: 2022
Journal volume:: 12
Journal issue:: 1
Fulltext / DOI:: doi:10.1038/s41598-022-08222-z
Publisher:: Springer Science and Business Media LLC
E-ISSN:: 2045-2322
Date of publication:: 30.03.2022
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