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- Title:
"Modeling and Manufacturing of an Electrostatic Actuator for Micropumps"
- Document type:
- Konferenzbeitrag
- Author(s):
- Leistner, H.; Anheuer, D.; Bosetti, G.; Schrag, G.; Richter, M.
- Book / Congress title:
- MikroSystemTechnik Kongress
- Year:
- 2021
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