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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Künzig, T.; Schrag, G.; Iannacci, J.; Wachutka, G. 
Title:
Improving the reliability of electrostatically actuated RF-MEMS switches: FEM simulations and measurements on a thermal recovery mechanism 
Pages contribution:
pp 340-345 
Book / Congress title:
Proceedings of the 13th Mechatronics Forum - International Conference 
Congress (additional information):
Mechatronics 2012, Sept. 17-19, Linz, Austria 
Year:
2012 
Reviewed:
ja 
Language:
en 
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