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- Title:
Acoustic High-Frequency Effects Inside the Package of Capacitive Silicon Microphones and Their Impact on the Device Performance
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Schrag, G.: Künzig, T.; Glacer, C.; Dehe, A.; Wachutka, G.
- Pages contribution:
- 95170M1-95170M6
- Book / Congress title:
- Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
- Date of congress:
- May, 4-6
- Year:
- 2015
BibTeX
Occurrences:
- mediaTUM GesamtbestandEinrichtungenSchools TUM School of Computation, Information and TechnologyDepartmentsElectrical EngineeringMicrosensors and Actuators (Prof. Schrag)