Metal-induced layer exchange (MILE) is a well-known method to grow large-grained high quality polycrystalline silicon on foreign substrates. In this thesis, the influence of an additional titanium interfacial layer on the MILE process dynamics as well as the structural, optical and electrical properties of the resulting layers were investigated. The process dynamics of the Ti.MILE as well as the structural, optical and electrical properties of the resulting layers were investigated. Furthermore, the electrical properties were varied by intentional boron and phosphorus doping.
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Metal-induced layer exchange (MILE) is a well-known method to grow large-grained high quality polycrystalline silicon on foreign substrates. In this thesis, the influence of an additional titanium interfacial layer on the MILE process dynamics as well as the structural, optical and electrical properties of the resulting layers were investigated. The process dynamics of the Ti.MILE as well as the structural, optical and electrical properties of the resulting layers were investigated. Furthermore,...
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