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Title:

Combining imaging ellipsometry and grazing incidence small angle X-ray scattering for in situ characterization of polymer nanostructures.

Document type:
journal article
Author(s):
Körstgens, V; Wiedersich, J; Meier, R; Perlich, J; Roth, SV; Gehrke, R; Müller-Buschbaum, P
Abstract:
A combination of microbeam grazing incidence small angle X-ray scattering (muGISAXS) and imaging ellipsometry is introduced as a new versatile tool for the characterization of nanostructures. muGISAXS provides a local lateral and depth-sensitive structural characterization, and imaging ellipsometry adds the position-sensitive determination of the three-dimensional morphology in terms of thickness, roughness, refractive index, and extinction coefficient. Together muGISAXS and imaging ellipsometry...     »
Journal title abbreviation:
Anal Bioanal Chem
Year:
2010
Journal volume:
396
Journal issue:
1
Pages contribution:
139-49
Language:
eng
Pubmed ID:
http://view.ncbi.nlm.nih.gov/pubmed/19685043
Print-ISSN:
1618-2642
TUM Institution:
Röntgendiagnostik
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