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Titel:

Combining imaging ellipsometry and grazing incidence small angle X-ray scattering for in situ characterization of polymer nanostructures.

Dokumenttyp:
journal article
Autor(en):
Körstgens, V; Wiedersich, J; Meier, R; Perlich, J; Roth, SV; Gehrke, R; Müller-Buschbaum, P
Abstract:
A combination of microbeam grazing incidence small angle X-ray scattering (muGISAXS) and imaging ellipsometry is introduced as a new versatile tool for the characterization of nanostructures. muGISAXS provides a local lateral and depth-sensitive structural characterization, and imaging ellipsometry adds the position-sensitive determination of the three-dimensional morphology in terms of thickness, roughness, refractive index, and extinction coefficient. Together muGISAXS and imaging ellipsometry...     »
Zeitschriftentitel:
Anal Bioanal Chem
Jahr:
2010
Band / Volume:
396
Heft / Issue:
1
Seitenangaben Beitrag:
139-49
Sprache:
eng
PubMed:
http://view.ncbi.nlm.nih.gov/pubmed/19685043
Print-ISSN:
1618-2642
TUM Einrichtung:
Röntgendiagnostik
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