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Title:

Noise Reduction for Sub-Nanometer Position Stability in High Dynamic Linear Drives

Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Markus Märkl; Rainer Hagl; Marcelo Heldwein
Abstract:
High accuracy and high acceleration are initially contradictory requirements for servo drives. Especially for production machines in the semiconductor industry, both dynamics and accuracy are particularly important. In this paper, a motion controller for a linear direct drive is optimized as a whole system. The correlation between dynamics and position stability is shown. Due to the availability of inverters based on wide-bandgap semiconductors as well as high-speed analog-to-digital converters...     »
Book / Congress title:
Conference Proceedings 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA)
Date of congress:
28-30 June 2023
Publisher:
IEEE
Date of publication:
03.11.2023
Year:
2023
Quarter:
4. Quartal
Year / month:
2023-11
Month:
Nov
Print-ISBN:
979-8-3503-2962-9
E-ISBN:
979-8-3503-2961-2
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1109/LDIA59564.2023.10297519
WWW:
https://ieeexplore.ieee.org/document/10297519
Semester:
WS 23-24
TUM Institution:
Lehrstuhl für Hochleistungs-Umrichtersysteme
Copyright statement:
(c)IEEE
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