High accuracy and high acceleration are initially contradictory requirements for servo drives. Especially for production machines in the semiconductor industry, both dynamics and accuracy are particularly important. In this paper, a motion controller for a linear direct drive is optimized as a whole system. The correlation between dynamics and position stability is shown. Due to the availability of inverters based on wide-bandgap semiconductors as well as high-speed analog-to-digital converters with 18 bit resolution, additional options for control loop design exist. A design approach is presented to decrease position noise with high control loop bandwidth. Based on the theoretical considerations, a standstill position stability of 20 pm is achieved on a test stand with a high-dynamic linear drive using a PWM frequency of 100 kHz.
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High accuracy and high acceleration are initially contradictory requirements for servo drives. Especially for production machines in the semiconductor industry, both dynamics and accuracy are particularly important. In this paper, a motion controller for a linear direct drive is optimized as a whole system. The correlation between dynamics and position stability is shown. Due to the availability of inverters based on wide-bandgap semiconductors as well as high-speed analog-to-digital converters...
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