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- Document type:
- Konferenzbeitrag
- Contribution type:
- Poster
- Author(s):
- Daniel Schiwietz
- Title:
- Temperature Dependence of Quality Factors at High Frequencies in MEMS Gyroscopes
- Book / Congress title:
- The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023)
- Date of publication:
- 16.01.2023
- Year:
- 2023
- WWW:
- https://mems23.org
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