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- Title:
Dry processing of high Q 3C-silicon carbide nanostring resonators
- Document type:
- Konferenzbeitrag
- Contribution type:
- Poster
- Author(s):
- Felix David
- Book / Congress title:
- 4th Frontier of Nanomechanical Systems (FNS / 2023)
- Date of publication:
- 06.06.2023
- Year:
- 2023
- WWW:
- https://www.fns2023.nl/
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