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- Title:
Effect of He+ implantation on nanomechanical resonators in 3C SiC
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Jagtap, Nagesh S.
- Book / Congress title:
- NanoNet NanoNet+ Annual Workshop 2022
- Date of publication:
- 04.10.2022
- Year:
- 2022
- WWW:
- https://www.hzdr.de/db/Cms?pOid=65570&pNid=171&pLang=en
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