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- Title:
Growth of aluminum nitride on a silicon nitride substrate for hybrid photonic circuits
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Terrasanta, G; Müller, M; Sommer, T; Geprägs, S; Gross, R; Althammer, M; Poot, M
- Journal title:
- Materials for Quantum Technology
- Year:
- 2021
- Journal volume:
- 1
- Journal issue:
- 2
- Pages contribution:
- 021002
- Fulltext / DOI:
- doi:10.1088/2633-4356/ac08ed
- Publisher:
- IOP Publishing
- E-ISSN:
- 2633-4356
- Date of publication:
- 01.06.2021
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