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- Title:
Total spectral radiant flux measurements on Xe excimer lamps from 115 nm to 1000 nm
- Document type:
- Konferenzbeitrag
- Author(s):
- Trampert, Klaus E.; Paravia, Mark; Daub, Rüdiger; Heering, Wolfgang
- Editor:
- Osten, Wolfgang; Gorecki, Christophe; Novak, Erik L.
- Book / Congress title:
- Optical Measurement Systems for Industrial Inspection V
- Publisher:
- SPIE
- Date of publication:
- 18.06.2007
- Year:
- 2007
- Fulltext / DOI:
- doi:10.1117/12.726104
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