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- Title:
Design and Fabrication of Individualized Capacitive Microsensor for Tilt Measurement
- Document type:
- Konferenzbeitrag
- Author(s):
- Cyril, B. K.; Schwesinger, N.
- Book / Congress title:
- 2015 IEEE Sensors
- Date of congress:
- 1-4. November 2015
- Year:
- 2015
- Pages:
- 1669-1672
- WWW:
- http://ieee-sensors2015.org/
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