A Study of Bisazido(dimethylamino-propyl)gallium as a Precursor for the OMVPE of Gallium Nitride Thin Films in a Cold-Wall Reactor System under Reduced Pressure
Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Devi, A.; Rogge, W.; Wohlfart, A.; Hipler, F.; Becker, H. W.; Fischer, R. A.