- Document type:
- Konferenzbeitrag
- Contribution type:
- Poster
- Author(s):
- Berke Demiralp
- Title:
- Fabrication of SiC Optomechanical Crystals
- Book / Congress title:
- 4th Frontier of Nanomechanical Systems (FNS / 2023)
- Date of publication:
- 09.06.2023
- Year:
- 2023
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