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- Title:
Patterning Platinum by Selective Wet Etching of Sacrificial Pt-A1 Alloy
- Document type:
- Konferenzbeitrag
- Author(s):
- Meier, S.; Rinck, H.; Lange, B.; Muellner, E.; Brederlow, R.; Enzelberger-Heim, M.; Summerfelt, S.; Kreupl, F.; Wolf, B.
- Book / Congress title:
- 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
- Publisher:
- IEEE
- Date of publication:
- 01.04.2020
- Year:
- 2020
- Print-ISBN:
- 9781728125398
- Fulltext / DOI:
- doi:10.1109/edtm47692.2020.9117886
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