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Title:

Patterning Platinum by Selective Wet Etching of Sacrificial Pt-A1 Alloy

Document type:
Konferenzbeitrag
Author(s):
Meier, S.; Rinck, H.; Lange, B.; Muellner, E.; Brederlow, R.; Enzelberger-Heim, M.; Summerfelt, S.; Kreupl, F.; Wolf, B.
Book / Congress title:
2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Publisher:
IEEE
Date of publication:
01.04.2020
Year:
2020
Print-ISBN:
9781728125398
Fulltext / DOI:
doi:10.1109/edtm47692.2020.9117886
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