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Titel:

High Q nanomechanical systems

Dokumenttyp:
Konferenzbeitrag
Art des Konferenzbeitrags:
Vortrag / Präsentation
Autor(en):
Weig, E.M.
Abstract:
Doubly-clamped pre-stressed silicon nitride string resonators excel as high Q nanomechanical systems enabling room temperature quality factors of several 100,000 in the 10 MHz eigenfrequency range. Dielectric transduction ideally complements the silicon nitride strings, providing an all-electrical control scheme while retaining the large mechanical quality factor [1]. It is mediated by an inhomogeneous electric field created between adjacent electrodes. The resulting gradient field pro...     »
Kongress- / Buchtitel:
8.12.2012, The 12th International Conference on Advanced Materials and Devices (ICAMD), hybride conference & virtual)
Kongress / Zusatzinformationen:
Jeju Island, Korea, 06-10 Dec 2021-12
Jahr:
2021
Quartal:
4. Quartal
Jahr / Monat:
2021-12
Monat:
Dec
Sprache:
en
WWW:
https://www.icamd.or.kr/index.php
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