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- Title:
Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Stritt, P.; Doster, J.; Dekorsy, T.; Gusev, V.; Weig, E.M.; Hettich, M.
- Abstract:
- Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions.
- Keywords:
- nanomechanics; elasticity; picosecond ultrasonics; nanoanalytics
- Book / Congress title:
- Proceedings of 4th International Conference nanoFIS - Functional Integrated nanoSystems, Proceedings 56, 31 2020-11
- Congress (additional information):
- Volume Editors: Köck, A.; Deluca, M.
- Publisher:
- MDPI proceedings
- Year:
- 2020
- Quarter:
- 4. Quartal
- Year / month:
- 2020-12
- Month:
- Dec
- Language:
- en
- Fulltext / DOI:
- doi:10.3390/proceedings2020056031
- WWW:
- https://www.mdpi.com/2504-3900/56/1/31
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