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Titel:

Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach

Dokumenttyp:
Konferenzbeitrag
Art des Konferenzbeitrags:
Textbeitrag / Aufsatz
Autor(en):
Stritt, P.; Doster, J.; Dekorsy, T.; Gusev, V.; Weig, E.M.; Hettich, M.
Abstract:
Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions.
Stichworte:
nanomechanics; elasticity; picosecond ultrasonics; nanoanalytics
Kongress- / Buchtitel:
Proceedings of 4th International Conference nanoFIS - Functional Integrated nanoSystems, Proceedings 56, 31 2020-11
Kongress / Zusatzinformationen:
Volume Editors: Köck, A.; Deluca, M.
Verlag / Institution:
MDPI proceedings
Jahr:
2020
Quartal:
4. Quartal
Jahr / Monat:
2020-12
Monat:
Dec
Sprache:
en
Volltext / DOI:
doi:10.3390/proceedings2020056031
WWW:
https://www.mdpi.com/2504-3900/56/1/31
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