User: Guest  Login
More Searchfields
Simple search
Title:

Stress control of tensile-strained In1−xGaxP nanomechanical string resonators

Document type:
Zeitschriftenaufsatz
Author(s):
Bückle, M.; Hauber, V.C.; Cole, G.D.; Gärtner, C.; Zeimer, U.; Grenzer, J.; Weig, E.M.
Abstract:
We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a c...     »
Dewey Decimal Classification:
000 Informatik, Wissen, Systeme
Journal title:
Appl. Phys. Lett. 113, 201903 2018-10
Year:
2018
Year / month:
2018-10
Quarter:
4. Quartal
Month:
Oct
Language:
en
Fulltext / DOI:
doi:10.1063/1.5054076
WWW:
https://aip.scitation.org/doi/10.1063/1.5054076
Publisher:
Applied Physics Letters AIP
 BibTeX