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Titel:

Monte Carlo simulation of leakage currents in TiN/ZrO2/TiN capacitors

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Jegert, G.; Kersch, A.; Weinreich, W.; Lugli, P.
Abstract:
Leakage currents in TiN/high-κ-ZrO2/TiN capacitors were simulated by using a novel kinetic Monte Carlo algorithm specially designed to describe tunneling transport of charge carriers in high-κ dielectrics, including defect-assisted transport mechanisms. Comparing simulation results with experimental data, a model for electronic transport was established and validated. Transport was found to be dominated by Poole-Frenkel emission from positively charged bulk trap states at medium voltages and tra...     »
Zeitschriftentitel:
Electron Devices, IEEE Transactions on (Volume:58 , Issue: 2 )
Jahr:
2011
Jahr / Monat:
2011-02
Quartal:
1. Quartal
Monat:
Feb
Seitenangaben Beitrag:
327-334
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.1109/TED.2010.2090158
WWW:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5648720
Verlag / Institution:
IEEE Xplore Digital Library
Semester:
WS 10-11
Format:
Text
 BibTeX