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Title:

Ultimate scaling of TiN/ZrO 2 /TiN capacitors: Leakage currents and limitations due to electrode roughness

Document type:
Zeitschriftenaufsatz
Author(s):
Jegert, G.; Kersch, A.; Weinreich, W.; Lugli, P.
Abstract:
n this paper, we investigate the influence of electrode roughness on the leakage current in TiN/high-κ ZrO 2 /TiN (TZT) thin-filmcapacitors which are used in dynamic random access memory cells. Based on a microscopic transport model, which is expanded to incorporate electrode roughness, we assess the ultimate scaling potential of TZT capacitors in terms of equivalent oxide thickness, film smoothness, thickness fluctuations, defect density and distribution, and conduction band offset (CBO). The...     »
Keywords:
Leakage currents Electrodes Capacitors Dielectric thin films Dielectrics
Journal title:
J. Appl. Phys. 109, 014504 (2011)
Year:
2011
Year / month:
2011-01
Quarter:
1. Quartal
Month:
Jan
Pages contribution:
14504
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1063/1.3531538
WWW:
http://scitation.aip.org/content/aip/journal/jap/109/1/10.1063/1.3531538
Publisher:
AIP Publishing LLC.
Semester:
WS 10-11
Format:
Text
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