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- Title:
VERTICAL INTERCONNECT STRUCTURE, MEMORY DEVICE AND ASSOCIATED PRODUCTION METHOD
- Document type:
- Patentanmeldung
- Patent application number:
- US 2012305873 (A1)
- Inventor:
- Gutsche; Martin; Kreupl; Franz ; Seidl; Harald
- Assignee:
- Gutsche; Martin; Kreupl; Franz ; Seidl; Harald
- Patent office:
- US
- Publication date application:
- 06.12.2012
- Year:
- 2012
- Language:
- en
- Covered by:
- Scopus
- TUM Institution:
- Hybride Elektronische Systeme
- Format:
- Text
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