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Title:

VERTICAL INTERCONNECT STRUCTURE, MEMORY DEVICE AND ASSOCIATED PRODUCTION METHOD

Document type:
Patentanmeldung
Patent application number:
US 2012305873 (A1)
Inventor:
Gutsche; Martin; Kreupl; Franz ; Seidl; Harald
Assignee:
Gutsche; Martin; Kreupl; Franz ; Seidl; Harald
Patent office:
US
Publication date application:
06.12.2012
Year:
2012
Language:
en
Covered by:
Scopus
TUM Institution:
Hybride Elektronische Systeme
Format:
Text
 BibTeX