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Title:

Surface Micro Machined Actuators on Piezoelectric Bulk Material

Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Zähringer, S.; Widmann, E.; Schwesinger, N.
Book / Congress title:
International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2011)
Organization:
IMAPS/ACer
Year:
2011
Month:
Apr
Reviewed:
ja
Language:
en
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