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- Title:
Mechanical Contact in System-level Models of Electrostatically Actuated RF-MEMS Switches: Experimental Analysis and Modeling
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Niessner, M. ; Iannacci, J. ; Schrag, G.
- Pages contribution:
- 80660Y-1-9
- Book / Congress title:
- Proceedings of SPIE: Smart Sensors, Actuators and MEMS V
- Congress (additional information):
- SPIE Microtechnologies 2011, April 18-20, Prague, Czech Republic
- Year:
- 2011
- Reviewed:
- ja
- Language:
- en
- Semester:
- SS 02
- Format:
- Text
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