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Title:

Mechanical Contact in System-level Models of Electrostatically Actuated RF-MEMS Switches: Experimental Analysis and Modeling

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Niessner, M. ; Iannacci, J. ; Schrag, G.
Pages contribution:
80660Y-1-9
Book / Congress title:
Proceedings of SPIE: Smart Sensors, Actuators and MEMS V
Congress (additional information):
SPIE Microtechnologies 2011, April 18-20, Prague, Czech Republic
Year:
2011
Reviewed:
ja
Language:
en
Semester:
SS 02
Format:
Text
 BibTeX