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Title:

Mixed-Level Modeling of Squeeze Film Damping in MEMS: Simulation and Pressure-Dependent Experimental Validation

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Niessner, M. ; Schrag, G.; Iannacci, J. ; Wachutka, G.
Pages contribution:
1693-1696
Book / Congress title:
Technical Digest of the 16th Int. Conference on Solid-State Sensors, Actuators and Microsystems -TRANSDUCERS` 2011
Congress (additional information):
June 5-9, Beijing, China
Year:
2011
Reviewed:
ja
Language:
en
Publication format:
CD-ROM / DVD
Semester:
SS 02
Format:
Text
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