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- Title:
Method for Fabricating a Nanoelement Field Effect Transistor with Surrounded Gate Structure
- Document type:
- Patent
- Patent number:
- US 7425487 (B2)
- Inventor:
- KREUPL, FRANZ [DE]; SEIDEL, ROBERT [DE]
- Patent office:
- USA
- Publication date patent:
- 12.01.2010
- Year:
- 2010
- Language:
- de
- TUM Institution:
- Hybride Elektronische Systeme
- Format:
- Text
BibTeX