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- Title:
Low-temperature atomic layer deposition of copper(II) oxide thin films
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Iivonen, Tomi; Hämäläinen, Jani; Marchand, Benoît; Mizohata, Kenichiro; Mattinen, Miika; Popov, Georgi; Kim, Jiyeon; Fischer, Roland A.; Leskelä, Markku
- Journal title:
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Year:
- 2015
- Journal volume:
- 34
- Journal issue:
- 1
- Fulltext / DOI:
- doi:10.1116/1.4933089
- Publisher:
- American Vacuum Society
- E-ISSN:
- 0734-21011520-8559
- Date of publication:
- 13.10.2015
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