Login
- Title:
A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution
- Document type:
- Konferenzbeitrag
- Author(s):
- Nurmetov, U.; Fritz, T.; Müllner, E.; Dougherty, C.; Kreupl, F.; Brederlow, R.
- Keywords:
- CMOS integrated circuits; error compensation; sensors; stress measurement; N-Well-based primary elements; stress magnitude; CMOS temperature stabilized sensor; 2D CMOS stress sensor; 2D mechanical stress sensor; repeatable error compensation; pressure -100.0 MPa to 360.0 MPa; temperature 5.0 degC to 90.0 degC; Stress; Resistors; Temperature sensors; Temperature measurement; Robot sensing systems; Stress measurement
- Book / Congress title:
- 2019 Symposium on VLSI Circuits
- Year:
- 2019
- Month:
- June
- Pages:
- C64-C65
- Fulltext / DOI:
- doi:10.23919/VLSIC.2019.8778132
BibTeX